| Brand | Celerity |
|---|---|
| MPN | UFC-8565C |
Check the listing for details. Celerity Unit UFC-8565C Mass Flow Controller MFC 5-Pin D-Net (NF3/5 SLM) C-Seals. Condition: Used. Listed at 199.99 USD. Manufacturer: Celerity. Process Gas: NF3 (Nitrogen Trifluoride Gas). Seals: Downport - C Seals. Flow Rate: 5,000 SCCM (5SLM). Interface: DeviceNet (5 Pin "M8"). Valve Position: Normally Closed. AMAT Part #: 0190-16332-003.
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