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MPN AFC 260
Port Diameter 1/4 in
Gas Media DCS/SiH2Cl2 [Dichlorosilane]
Brand Qualiflow
Maximum Flow Rate 2000 SCCM (2 SLM)
Model AFC 260

Check the listing for details. NEW Qualiflow AFC 260 2 SLM SiH2Cl2 Mass Flow Controller MFC ASM. Condition: New – Open box. Listed at 314.29 USD. NEW Qualiflow AFC 260 2 SLM SiH2Cl2 Mass Flow Controller MFC for ASM Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Qualiflow and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This part is new, old stock from ASM. The unit was calibrated by Coastal Instruments and sat on the shelf. The calibration is past due. The Unit's Tag Reads: Model Number: AFC 260 Serial Number: 007263659 Flow Range: 2 slm Gas: SiH2Cl2 Features: Compatible with other MFC Economic design, simple construction Compatible with MODULINE via optional adapting connector (from factory) Outstanding records throughout various industries Possibility to regulate with external readout Specifications: Flow Range (equivalent N2): 10 sccm to 5 slm (this unit is setup for 50 sccm) Control Range: 2 - 100% F.S. Valve Type: Thermal Valve Rest Position: Normally Open only Accuracy: ±1% of F.S. Linearity: ±0.5% of F.S. Repeatability: ±0.3% of F.S. Sensibility to Mounting Position: ±0.1% of F.S. Step Response Time: ~6 sec. typical (SEMI E17-91) Operating Temperature: 5 ~ 40°C, non-condensing Temperature Coefficient: < 0.5% F.S./°C Maximum Inlet Pressure: 1 MPa (10 bar, 150 psi) Minimum Differential Pressure: 50 kPa (70 kPa with H2) Maximum Differential Pressure: 300 kPa (3 bar, 43 psi) Pressure Coefficient: < 0.1% F.S./105 Pa Wetted Materials: 316 L Stainless steel Leak Integrity: < 2.10-8 atm.scc/sec (He) Standard Seals: Viton, Neoprene (this unit has the Viton seal) Fittings: 1/4" VCR, Swagelok Weight: 0.5 Kg Input and Output Specifications: Mass Flow Meter: ±15 VDC, 50 mA Input and Output Signal: From 0 to 5 VDC Electrical Connector: Card edge For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $50.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? 07/24/14

$157.15
$314.29