Check the listing for details. SPM Technology 30832 ESC Electrostatic Chuck Service Cover DPS New Surplus. Condition: New – Open box. Listed at 303.20 USD. SPM Technology 30832 ESC Electrostatic Chuck Service Cover DPS New Surplus Inventory # CONF-1534 Part No: 30832 Model No: SERVICE COVER, ESC, DPS This SPM Technology 30832 Service Cover DPS ESC is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 10"x10"x10" @ 4 lbs. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Items are sold with a 90-Day Satisfaction Guarantee Lister 7